Features  

·Integrating the 3 major deposition modules of evaporation, RPD, and PVD into one, the 3 functions can be operated independently at the same time, and the experimental up time is comparable to three equipment, with high production capacity.

·Implementing the evaporation, RPD and PVD vacuum continuous deposition process, providing multiple combination coatings, 

 and implementing the layered Perovskite layer process in one step is beneficial for optimizing the film interface, reducing loading and unloading, and transmission damage, and improving the efficiency and cost of mass production equipment.

·Adopting a moving deposition mode that is consistent with the mass production process, improving the success rate of future expansion and reducing the risk of large-scale mass production.

·Autonomous programming and user-friendly operation interface; multi level authorization setting for information confidentiality; rigorous and comprehensive safety design, with comprehensive anti daze functions; Green, environmentally friendly, energy-saving design.